ダマシン法によるY字型Ni_<80>Fe_<20>構造規則配列の作製と磁気的評価(磁性体物理・超伝導)

概要

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Regularly aligned arrays (linear and honeycomb arrangements) of Y-shaped Ni_<80>Fe_<20> (permalloy) nanodots buried in silicon wafers were fabricated using the damascene technique, and electron beam lithography (EB). The distributions of surface magnetization were observed by means of magnetic force microscopy (MFM), and the internal spin distributions were analyzed by a micromagnetic simulation using the Landau-Lifshitz-Gilbert equations (LLG eq.). Spin distributions are determined by the effects of geometric shapes and magnetostatic interactions working between adjacent dots.
社団法人日本磁気学会の論文
2006-03-01