High Rate Deposition of Thick Piezoelectric ZnO and AlN Films Using a New Magnetron Sputtering Technique : Communication Devices and Materials
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1981-09-01
著者
-
HATA Tomonobu
Faculty of Technology, Kanazawa University
-
Takeda Fumio
Toyama National College Of Technology
-
Takeda Fumio
Toyama Technical College
-
Hata Tomonobu
Faculty Of Engineering Kanazawa University
-
MORIMOTO Osamu
Toyama Technical College
-
NODA Etsuji
Faculty of Technology, Kanazawa University
-
HADA Toshio
Toyama Technical College
-
Noda Etsuji
Faculty Of Technology Kanazawa University
関連論文
- Optical and Thermal Evaluation of Semiconductor by Differential Photothermal Deflection Spectroscopy : Photoacoustic Spectroscopy and Ultrasonic Imaging
- Determination of Material Thermal Properties Using Photoacoustic Signals Detected by a Transparent Transducer
- Analysis of Pyroelectric Signal in Photoacoustic Spectroscopy Using a Transparent Transducer
- Influence of Piezoelectric and Pyroelectric Effects on Signal of PAS Using a Transparent Transducer : Photoacoustic Spectroscopy and Ultrasonic Imaging
- Theoretical Analysis of Photoacoustic Signal on PAS Using a Transparent Transducer : Photoacoustic Effect and Spectroscopy
- Consideration on PA Signals of Multilayer Structure Measured by PAS Using Transparent Transducer : Photoacoustic Spectroscopy
- Reduction of Internal Stress by Compositional Gradient Layer Inserted between TiSi_2 and Si
- Evaluation of Multilayer Structure and Depth Profile by PAS Using a Transparent Transducer : Photoacoustic Spectroscopy
- Evaluation of Ion Implantation into Silicon Photoacoustic Spectroscopy using Transparent Transducer Method : Photoacoustic Spectroscopy
- High Velocity and High Coupling Surface Acoustic Waves Using ZnO Films on Ceramic Substrates with High Acoustic Velocity : SAW and Communication Devices
- High Rate Deposition of Thick Piezoelectric ZnO and AlN Films Using a New Magnetron Sputtering Technique : Communication Devices and Materials
- Preparation of Tungsten-Bronze Thin Films : Thin Films
- Composition Control of NiTi Shape Memory Alloy Films Formed by Sputter Deposition with a Composite Target
- Change in the characteristics of amorphous As_2S_3 induced by injected acoustic domains : Physical Acoustics
- High Rate Deposition of ZnO Film Using Improved DC Reactive Magnetron Sputtering technique : C-2: SURFACE WAVE AND MAGNETIC DEVICES
- Evaluation of Optical Absorption Coefficient of Si by Photothermal Spectroseopy Using Transparent Pyroelectric Transducer
- Feasibility of Ultra-Thin Films for Gate Insulator by Limited Reaction Sputtering Process(Recent Progress in Oxide Thin Films by Sputtering)
- High Rate and Low Temperature Deposition of Co-Cr Films by Exposed Pole Magnetron Co-Sputtering System
- Optical-Transmission Modulation in CdS Caused by Off-Axis Acoustoelectric Domain
- New Control Method of CdS High Field Demain Velocity Induced by Injected Acoustic Flux
- Mechanisms of Transmitted Optical Modulation Caused by Acoustic Flux in CdS
- Threshold Electric Field for Domain Formation in Semiconductive CdS
- Measurement of Nonlinear Acoustic Gain in CdS
- Study on Differential Photothermal Deflection Spectroscopy (PDS) Considering the Intensity Profile of a Probe Beam