Reduction of Internal Stress by Compositional Gradient Layer Inserted between TiSi_2 and Si

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1989-12-20

著者

• Horita Susumu

  Faculty Of Technology Kanazawa University

• HATA Tomonobu

  Faculty of Technology, Kanazawa University

• TSUCHITANI Masanobu

  Faculty of Technology, Kanazawa University

• KAMIYA Kenji

  Faculty of Technology, Kanazawa University

• Kamiya Kenji

  Faculty Of Technology Kanazawa University

• Kamiya Kenji

  Faculty Of Engineering Keio University

• Hata Tomonobu

  Faculty Of Engineering Kanazawa University

• Tsuchitani Masanobu

  Faculty Of Technology Kanazawa University

関連論文

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• Theoretical Analysis of Photoacoustic Signal on PAS Using a Transparent Transducer : Photoacoustic Effect and Spectroscopy
• Consideration on PA Signals of Multilayer Structure Measured by PAS Using Transparent Transducer : Photoacoustic Spectroscopy
• Reduction of Internal Stress by Compositional Gradient Layer Inserted between TiSi_2 and Si
• Evaluation of Multilayer Structure and Depth Profile by PAS Using a Transparent Transducer : Photoacoustic Spectroscopy
• Evaluation of Ion Implantation into Silicon Photoacoustic Spectroscopy using Transparent Transducer Method : Photoacoustic Spectroscopy
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