Practical Optical Proximity Effect Correction Adopting Process Latitude Consideration
スポンサーリンク
概要
- 論文の詳細を見る
- 1995-12-30
著者
-
Sugawara Mitsuru
北海道大学 薬学研究臨床薬剤学
-
Tomita Manabu
Semiconductor Company Sony Corporation
-
Sugawara M
Fujitsu Laboratories Ltd.
-
Ohnuma Hidetoshi
Process Development Department Semiconductor Company Sony Corporation
-
TSUDAKA Keisuke
Process Development Department, Semiconductor Company, Sony Corporation
-
NOZAWA Satoru
Process Development Department, Semiconductor Company, Sony Corporation
-
TSUDAKA Keisuke
Semiconductor Company, Sony Corporation
-
KAWAHIRA Hiroichi
Semiconductor Company, Sony Corporation
-
SUGAWARA Minoru
Semiconductor Company, Sony Corporation
-
OHNUMA Hidetoshi
Semiconductor Company, Sony Corporation
-
NOZAWA Satoru
Semiconductor Company, Sony Corporation
-
Nozawa Satoru
Process Development Department Semiconductor Company Sony Corporation
-
Tsudaka Keisuke
Process Development Department Semiconductor Company Sony Corporation
-
Sugawara M
Semiconductor Company Sony Corporation
-
Kawahira Hiroichi
Process Development Department Semiconductor Company Sony Corporation
-
Sugawara M
Fujitsu Limited And Fujitsu Laboratories Limited
関連論文
- Polarization-Independent Photoluminescence from Columnar InAs/GaAs Self-Assembled Quantum Dots : Semiconductors
- Quantum-Dot Semiconductor Optical Amplifiers for High Bit-Rate Signal Processing over 40Gbit/s
- A Model of Carrier Capturing and Recombination Process in Quantum-Dot System : Influence of Excitation Power on Spontaneous Emission Intensity and Lifetime
- Lasing Characteristics and Carrier Dynamics of 1.3-μm InGaAs/GaAs Quantum Dot Lasers
- Narrow Photoluminescemce Line Width of Closely Stacked InAs Self-Assembled Quantum Dot Structures
- Self-Formed InGaAs Quantum Dot Lasers with Multi-Stacked Dot Layer
- Controlled Quantum Confinement Potentials in Self-Formed InGaAs Quantum Dots Grown by Atomic Layer Epitaxy Technique
- Self-Formed In_Ga_As Quantum Dots on GaAs Substrates Emitting at 1.3 μm
- Functional analysis of phenolsulfonphthalein transport system in Long-Evans Cinnamon rats
- Characterization of Secretory Intestinal Transport of Phenolsulfonphthalein
- Comparison of the Disposition Behavior of Organic anions in an Animal Model for Wilson's Disease (Long-Evans Cinnamon rats) with that in Normal Long-Evans Agouti rats
- Mechanism of Active Secretion of Phenolsulfonphthalein in the Liver via Mrp2 (abcc2), an Organic Anion Transporter
- Single-step isolation method for six glycoforms of human α_1-acid glycoprotein by hydroxylapatite chromatography and study of their binding capacities for disopyramide
- Purification method for α-1-acid glycoprotein with subsequent high-performance liquid chromatographic determination of monosaccharides in plasma of healthy subjects and patients with renal insufficiency
- Slow Carrier Relaxation among Sublevels in Annealed Self-Formed InGaAs/GaAs Quantum Dots
- The Effect of Membrane Surface Potential on the Permeability of Anionic Compounds Across the Apical Membrane in Human Intestinal Epithelial (Caco-2) Cells
- The Transport Mechanism of an Organic Cation, Disopyramide, by Brush-Border Membranes. : Comparison Between Renal Cortex and Small Intestine of the Rat.
- UPTAKE CHARACTERISTICS OF POLYAMINES INTO RAT INTESTINAL BRUSH-BORUER MEMBRANE VESICLES
- MECHANISM OF GASTROINTESTINAL ABSORPTION OF β-LACTAM ANTIBIOTICS : Contribution of Passive Diffusion to the BBM Permeation Process
- Smoothing Roughness of SiC Membrane Surface for X-Ray Masks : X-Ray Lithography
- Smoothing Roughness of SiC Membrane Surface for X-Ray Masks
- Lithography Computer Aided Design Technology for Embedded Memory in Logic
- Simulation-Based Automatic Optical Proximity Effect Correction Adaptive for Device Fabrication
- Practical Optical Proximity Effect Correction Adopting Process Latitude Consideration
- New Systematic Evaluation Method for Attenuated Phase-Shifting Mask Specifications
- Evaluation of Phase-Shifting Masks for Dense Contact Holes Using the Exposure-Defocus and Mask Fabrication Latitude Methodology
- Uniform RF Discharge Plasmas Produced by a Square Hollow Cathode with Tapered Shape
- RF Hollow Cathode Discharges with Tapered Shape
- Monte Carlo Simulation of RF Plasmas and Trial Investigation of Similarity Rule
- A Monte Carlo Simulation of Langmuir Probe Methods for Plasmas Having RF Amplitude Oscillations
- Controlling Polarization in Quantum-dot Semiconductor Optical Amplifiers