Influence of Electrode Contacts on Leakage Current of SrTiO_3 Capacitors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-12-01
著者
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Yamada M
Ibaraki Univ. Ibaraki Jpn
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Yamada M
Process Development Division Fujitsu Ltd.
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Yamada M
Sony Corp. Tokyo Jpn
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TAMURA Tetsuro
Process Development Division, Fujitsu Ltd.
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TAKAI Kazuaki
Process Development Division, Fujitsu Ltd.
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NOSHIRO Hideyuki
Process Development Division, Fujitsu Ltd.
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KIMURA Mami
Process Development Division, Fujitsu Ltd.
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OTANI Seigen
Process Development Division, Fujitsu Ltd.
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YAMADA Masao
Process Development Division, Fujitsu Ltd.
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Kimura Mami
Process Development Division Fujitsu Ltd.
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Otani Seigen
The Authors Are With Advanced Material And Fram Development Dept. Ulsi Development Div. Fujitsu Limi
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Otani Seigen
Advanced Technology Division Fujitsu Ltd.
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Takai K
Kyoto Univ. Kyoto‐shi Jpn
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Tamura T
Silicon Technology Lab. Fujitsu Laboratories Ltd.
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Noshiro H
Process Development Division Fujitsu Ltd.
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