Porous β-SiC Fabrication by Electrochemical Anodization
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-07-15
著者
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Tamura Takao
Department Of Precision Engineering Faculty Of Engineering Osaka University
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TAKAZAWA Akira
Department of Physics, Faculty of Science, Science University of Tokyo
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Yamada M
Ibaraki Univ. Ibaraki Jpn
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Yamada M
Process Development Division Fujitsu Ltd.
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Yamada M
Sony Corp. Tokyo Jpn
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TAKAZAWA Akira
Basic Process Development Division, Fujitsu Ltd.
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TAMURA Tetsuro
Basic Process Development Division, Fujitsu Ltd.
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YAMADA Masao
Basic Process Development Division, Fujitsu Ltd.
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Takazawa A
Megaopto Co. Ltd. Saitama Jpn
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