Effects of Back-Channel Etching on the Performance of a-Si:H Thin-Film Transistors
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1998-07-15
著者
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Ando Masami
Photon Factory National Laboratory For High Energy Physics (kek)
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Minemura T
Hitachi Ltd. Ibaraki Jpn
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WAKAGI Masatoshi
Hitachi Research Laboratory, Hitachi, Ltd.
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MINEMURA Tetsuroh
Hitachi Research Laboratory, Hitachi, Ltd.
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Maksimenko Anton
Photon Factory Imss Kek
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Ando Masahiko
Hitachi Research Laboratory Hitachi Ltd.
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Minemura Tetsuroh
Hitachi Research Laboratory Hitachi Ltd.
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Wakagi M
Hitachi Ltd. Ibaraki Jpn
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Wakagi Masatoshi
Hitachi Research Laboratory Hitachi Ltd.
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Ando Masahiko
Hitachi Cambridge Laboratory, Hitachi, Ltd., J.J. Thomson Avenue, Madingley Road, Cambridge CB3 0HE, U.K.
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