Direct Patterning of Spin-on Glass by Focused Ion Beam Irradiation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-12-30
著者
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Goto Toshikazu
Department Of Neurological Surgery Nihon University School Of Medicine
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Goto Toshikazu
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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YANAGISAWA Junichi
Department of Physical Science, Graduate School of Engineering Science, Osaka University
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KOH Young-Burn
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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GAM0 Kenji
Department of Electrical Engineering, Faculty of Engineering Science, Osaka University
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Gam0 Kenji
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University:research Center
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Koh Young-burn
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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Yanagisawa Junichi
Department Of Electrical Engineering Faculty Of Engineering Science Osaka University
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GOTO Toshikazu
Depart-ment of Internal Medicne Yamagata Prefectural Central Hospital
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