Nueleatioru of Oxygen Precipitates during Cooling Processes in Czochralski Silicon
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-09-15
著者
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YAMANAKA Hirokazu
Department of Materials Science, Osaka Electro-Communication University
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Yamanaka Hidetoshi
Department Of Materials Science Osaka Electro-communication University
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Yamanaka H
Department Of Materials Science Osaka Electro-communication University
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YAMANAKA Hideki
MEMC Division, Hits Japan, Ltd.
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Yamanaka Hideki
Memc Division Huls Japan Ltd.
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