Dislocation Etch Pits on Solution Grown Gallium Phosphide

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1969-02-05

著者

• Shiraki Hiromitsu

  Central Research Laboratories Nippon Electric Co. Ltd.

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• Stacking Fault Generation Suppression and Grown-In Defect Elimination in Dislocation Free Silicon Wafers by HCl Oxidation
• Elimination of Stacking Faults in Silicon Wafers by HCl Added Dry O_2 Oxidation
• Dislocation Etch Pits on Solution Grown Gallium Phosphide

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