Thermodynamic Calculation for the Vapor Growth of In_xGa_<1-_x>As: The In-Ga-As-Cl-H System
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概要
- 論文の詳細を見る
The composition of the gas phase in equilibrium with In_xGa_<1-_x>As is calculated for various parameters, using a computation procedure previously developed for the analysis of the growth of In_xGa_<1-_x>P crystals. It is shown that the major vapor species are H_2, InCl, GaCl, As_4 and HCl and that some of the experimental features of the published works can be explained by the thermodynamic model.
- 社団法人応用物理学会の論文
- 1972-06-05
著者
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SEKI Hisashi
Faculty of Technology, Tokyo University of Agriculture and Technology
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Seki Hisashi
Faculty Of Technology Tokyo University Of Agriculture And Technology
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Eguchi Hiroshi
Faculty Of Technology Tokyo University Of Agriculture And Technology
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MINAGAWA Shigekazu
Central Research Laboratory, Hitachi Ltd.,
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Minagawa Shigekazu
Central Research Laboratory Hitachi Lid.
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