走査型磁気抵抗効果顕微鏡用カンチレバーの設計と試作

概要

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A variety of techniques have been proposed to measure surface magnetic properties using scanning probe microscopy. The most widely used is magnetic force micrcoscopy (MFM). In many cases, however, it is hard to analyze MFM data quantitatively. A magnetoresistive (MR) device is also a candidate for such a sensor that can operate at room temperaature with high sensitivity. Yamamoto et al. have demonstrated a scanning magnetoresistance microscope (SMRM) using a commercially availale MR read-head for a hard disk. Since they held the MR head on a slider, there was no feedback system to ccntrol the distance between sample and sensor. We made a cantilever for the MR sensor to get the surface topography and magnetic properties simultaneously. Its magnetic field sensitivity with 10-mA sensing current is 90μV/Oe, and our roughly estimated minimum field resolution is a few mOe (only Johnson noise is assumed with 10-kHz bandwidth at room temperatue), which is much better than that of a scanning Hall probe microscope.
2000-04-15