F-0521 アブレッシブウォータジェットによるマイクロ微細加工の加工特性(J17-1 マイクロトライボロジー&プロセッシング(1))(J17 マイクロトライボロジー&プロセッシング)

概要

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Abrasive water jet is applied to micro fabrication on glass. The principle of machining is discussed with erosion effect, which depends on diameter, impingement angle, and velocity of abrasive particles. The presented approach specifies the position and width of grooves with masks. Non-steady two-phase flow analysis shows the fluid field in the machining area around the masks. Brittle fracture does not happen at the right under nozzle because of stagnation flow. Stagnation flow made with the taper of masks changes the flow direction. Abrasive fluid, which flows on the surface with the angle almost horizontal, machines glass surface without brittle fracture. The effect of flow velocity on machining rate is examined. It is shown that the higher velocity makes the higher machining rate and the better surface roughness.
一般社団法人日本機械学会の論文
2001-08-22