533 微小径砥石によるガラスのマイクロ溝加工(OS11 研削・砥粒加工)

概要

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This paper discusses grinding processes to machine micro channels in a depth of IS^m. The effects of the grinding lubricant and the feed rate on the machined surface are shown in the experiments. The glasses are machined with the tilted grinding tools made of diamond. The grinding tools, whose diameter is 0.709mm, are mounted on a blushless motor spindle. It is shown that the glass can be machined with suppressing brittle fracture in grinding with oil. On the other hand, brittle cracks are observed on the surface machined in water. The surface roughness increases with the feed rate because of the trajectory of the abrasive grains. The surface finish machined in the disengagement process of the abrasive grains is worse than that of the engagement.
社団法人日本機械学会の論文
2004-11-19