204 ガラスのマイクロ多軸切削加工(OS-7 ナノ・マイクロ加工)

概要

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Glass cutting is discussed to improve the machining rate with the roughing process. Glass can be machined in a large axial depth of cut more than 0.1mm in the roughing process. The brittle damage occurs in the subsurface less than 10μm deep. The brittle damage, then, can be removed in the finishing process. A machine tool is developed to manufacture micro-scale parts in cutting. The machine tool has 5 axes driven by stepping motors with high resolution. The machine tool has a table controlled by the linear motions of X- and Y-axis and the rotational motion of A- and C-axis ; and a spindle with the cutting tool controlled by Z-axis. The machining processes can be controlled by a personal computer. Some cutting tests are performed to verify the design and the efficiency in micro machining on the developed machine tool.
社団法人日本機械学会の論文
2006-11-24