227 アブレッシブウォータジェットによるガラスのマイクロ微細加工機の開発(OS5 電子部品・光学部品の超精密加工)

概要

論文の詳細を見る
Abrasive water jet is applied to micro fabrication on glass. The presented approach specifies the position and width of grooves with masks. The principle of machining is discussed with erosion effect, which depends on diameter, impingement angle, and velocity of abrasive particles. Non-steady two-phase flow analysis shows stagnation area around the masks reduces flow velocity at the right under nozzle and changes abrasive flow to horizontal direction on glass surface with high velocity. Micro fabrication machine is developed to make a sequential pattern. Because the mask is fixed on jet nozzle fixture, 3-axis control can specify machining position with moving and/or rotating workpiece table. It is shown the developed machine works well to make patterns on glass with fine surface finish.
一般社団法人日本機械学会の論文
2001-11-20