硬脆材料のエンドミル加工(S56-1 エンドミル加工の高速・高精度化(1),S56 エンドミル加工の高速・高精度化)

概要

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This paper discusses machining characteristics in milling of brittle materials to machine micro channels on micro TASs (Total Analysis Systems). Fused silicate glass and soda lime glass are machined with ball end mills whose diameter are 0.4mm (nose radius 0.2mm) at a revolution rate of 20000rpm in an axial depth of cut of 20*m. It is shown that fused silica can be machined without brittle fracture when the feed rate per edge is less than 6.0nm/edge. The critical position where the first brittle crack is left on the machined surface during a cutter rotation can be associated with Weibull distribution. The brittle cracks occur fast at a high feed rate per edge. The deviation of the critical positions in machining of fused silica is larger than that of soda lime glass because of less crack initiation.
社団法人日本機械学会の論文
2004-09-04