スパッタ法およびガス窒化法により作製したTiN皮膜の耐摩耗性に及ぼすはく離強度の影響

概要

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TiN films were deposited on pure titanium specimens by reactive RF magnetron sputtering and gas nitriding methods. Pin-on-disk type wear tests were carried out to evaluate the effect of interfacial strength on the wear resistance of TiN films. The results showed that the wear property was improved remarkably by both methods, but the effect quickly disappeared after a certain number of rotation cycles. Optical observation of wear scars during wear tests showed that delamination of a small part of the film occurred and the area extended within a small increase in rotation cycles. When a coated specimen with an interfacial crack receives shear load by the friction of moving pin, the interfacial fracture toughness, G_<C1/2>, is calculated by the following equation : G_<C1/2>= (μ-μ_<12>)^2 P^2 /8 E_1(B_1- h_d){R^2 - (R-h_d)^2} where P is the normal load of the pin at delamination, R is radius of curvature of pin, B_1 and E_1 are thickness and elastic constant of the film, μ is the friction coefficient between pin and film, μ_<12> is that between partially delaminated film and substrate, and h is the depth of the wear scar. The G_<C1/2> decreased with increase in the number of rotation cycles, which indicated the degradation of the interfacial fracture toughness caused by damage accumulation during the wear test.
一般社団法人日本機械学会の論文
2001-06-25