405 スパッタ法およびガス窒化法により作製した TiN 皮膜の耐摩耗性に及ぼすはく離強度の影響

概要

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TiN films were deposited on pure titanium specimens by reactive RF magnetron sputtering and gas nitriding methods. Wear tests of the specimens were carried out by using pin-on-disk type testing machine. The results showed that the wear property was modified remarkably by both methods, but the effect disappeared after a large number of rotation cycles. Optical observation of wear scars during wear tests showed that the delamination of small part of the film occurred and the area became large with the increase in rotation cycles. The interfacial fracture toughness was obtained fracture mechanically, which indicated that the interfacial fracture toughness had close relationship with wear performance of film.
一般社団法人日本機械学会の論文
2000-07-31