工業用純チタンの腐食挙動に及ぼすN_2^+イオン注入の影響

概要

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N_2^+ ions were implanted into commercially supplied pure tiatnium with different doses ranging from 5×10^<16> to 1×10<18> ions/cm^2, and the corrosion behavior was investigated in 70% sulphuric acid solution. Anodic polarization curves show that the peak anodic current density, passivation current density, and corrosion potential increase with increase in implantation dose when the dose is less than 1×10^<17> ions/cm^2. When the implanted dose is 5×10^<17> ions/cm^2, the corrosion resistance decreases though it is still larger than no implanted titanium. X-ray diffraction analysis shows the formation of titanium nitride on the implanted surface, i.e., Ti_2N is found when the implanted dose is larger than 5×10^<16> ions/cm^2 and both Ti_2N and TiN when the implanted dose is 1×10^<18> ions/cm^2. The aging at 673K after ion implantation largely increases the corrosion resistance, which corresponds to the enhanced precipitation of Ti_2N and TiN. AFM observation shows fine particales of titanium nitrides on the implanted surface. It is considered that the precipitation of Ti_2N or TiN decreases the effective corrosion area to make the corrosion resistance higher.
社団法人日本材料学会の論文
1999-05-15