静圧案内面を運動縮小機構として利用した超精密位置決めシステムの開発

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A new type of ultraprecision positioning system using an aerostatic guideway with active control system is proposed. The control system employs an Active Inherent Restrictor (abbreviated AIR) invented by the authors. The AIR consists of a piezoelectric actuator having a through hole, one end of which is small enough to function as an orifice when the actuator is embedded in the bearing surface. By changing the length of the piezoelectric actuator, the AIR controls the air film thickness and the position of the table supported aerostatically by the guideway. Owing to aerostatic mechanism, the table displacement normal to the guideway can be much less than the deformation of the actuator. This means that the aerostatic guideway with the AIR acts as a motion-reduction mechanism. Full stroke of the actuator is 3.5μm. while that of the table is 110μm, then the reduction ratio of this mechanism is about thirty. Dynamic step positioning of the table shows that the settling time is about 30ms and the slewing rate is about 4.5nm/ms. Static step positioning with various step width shows that the positioning resolution is 50pm. Therefore, the stroke is short, however, the system can be used for picometer positioning. Under step positioning of the table, an aluminum alloy mounted on the table is turned by a single point diamond tool. On the turned surface, micro steps, depth of which is 16nm, can be resolved. This shows that the positioning system can be used to control the depth of cut.
社団法人精密工学会の論文
2001-09-05

静圧案内面を運動縮小機構として利用した超精密位置決めシステムの開発

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