ツイストローラ方式摩擦駆動による精密位置決め機構の研究

概要

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For sub-micrometer and nanometer order positioning, a twist-roller friction drive is proposed. With a small twist angle, three driven rollers supported by a hydrostatic bearing system are pressed against a driving shaft. As the shaft rotates, the rollers rotate and move in their axial direction. This axial motion is used for positioning. The axial displacement of the rollers per one revolution of the driving shaft is equivalent to the lead of a screw. Within ±0.1 mm, the lead of the twist-roller friction drive can be changed by controlling the oil supply pressure for the hydrostatic thrust bearings which support the axial direction of the rollers. Therefore, nanometer positioning can be realized by using a driving motor having the resolution of only tens of thousands pulses/revolution. The twist-roller friction drive is incorporated into a table which is guided by a hydrostatic slideway. Measured characteristics such as the lead, sub-micrometer step feed, and closed loop positioning of the table are shown.
1991-08-05