無限剛性空気静圧軸受で構成されたスピンドルの試作

概要

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An infinite-stiffness aerostatic spindle is proposed, where two kinds of active restrictors are employed. These active restrictors have been invented by the authors. One is an Aerostatically Controlled Restrictor (ACR) which is a pressure-feedback active restrictor, and it is incorporated into an aerostatic thrust bearing. Another is an Exhaust Control Restrictor (ECR) which is a displacement-feedback active restrictor, and it is incorporated into an aerostatic radial bearing. Thrust stiffness at the end of the spindle is proved to be infinite for the thrust load less than 240 N, and radial stiffness at the end of the spindle is also prove to be infinite for the radial load less than 15 N. Rotational accuracy in thrust direction is less than 20 nm, and in radial direction is about 50 nm. Thus, it is shown that these active restrictors realize an infinite-stiffness spindle for precision applications.
1993-04-05