自動調整絞り付高剛性空気静圧軸受の動特性に関する研究

概要

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It has been shown that the static stiffness of an aerostatic bearing can be infinite by using an aerostatically-controlled active restrictor (abbreviated ACR). In the present paper, the dynamic characteristic of this infinite-stiffness aerostatic thrust bearing with the ACR is analysed. The ACR is a kind of surface restrictor, and its fluid resistance can be controlled by a restrictor ring supported by another aerostatic bearing incorporated into the thrust bearing. Therefore, this aerostatic thrust bearing with the ACR can be expressed by a two-degree of freedom spring-mass system. From the numerical simulation and measurement of the step response of the bearing, it is shown that the settling time of the thrust bearing is about 10 ms. From the analysis of the frequency response, it is shown that the ACR suppresses the vibration of the thrust bearing for a time-varying load whose frequency is less than 10 Hz.
1989-09-05