圧電素子を用いた高精度回転微動機構(第2報) : 信頼性

概要

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In the 1st report, it has been shown that a newly developed piezoelectric-driven turntable moved by the "inchworm" function is capable of positioning accuracy with less than 4.8×10^<-7> rad (00.1 arcsec) for a range of π/2. And it also has the following advantages ; (1) operable in a vacuum environment, (2) non-magnetic material construction, (3) small heat generation, (4) compactness. However, there were some problems for practical use, such as the reliability of the piezoelectric actuator and wear of the clamping parts. In the present report, it has been shown that the developed piezoelectric-driven turntable can be used continuously for a long period of time, over 2OOO hrs, by improving the piezoelectric actuator and by appropriate clamp clearance selection.
公益社団法人精密工学会の論文
1989-12-05