圧電素子を用いた高精度回転微動機構(第1報) : 回転原理と基本特性

概要

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A computer-controlled positioning turntable has been developed for microfabrication applications. A newly designed highly accurate positioning turntable is driven by the "inchworm" function using piezoelectric actuators. The positioning turntable can move for a long stroke with excellent positioning accuracy. All parts constructing the positioning turntable can be made of nonmagnetic materials. The turntable can also be used in a vacuum environment. The positioning turntable travel is π/2 radians. The angular velocity can be controlled up to 3.2×10^<-2> rad/s by changing the "inchworm" function stepping rate. Average value for and standard deviation in moving resolution are 1.67×10^<-7> rad (0.035 arcsec) and 7.05×l0^<-8> rad (0.015 arcsec), respectively. A less than 4.8×10^<-6> rad (0.1 arcsec) positioning accuracy has been achieved.
公益社団法人精密工学会の論文
1987-06-05