Nd : YAGレーザとKOH液によるAl_2O_3/TiCセラミックスのレーザアシストエッチング

概要

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Laser-assisted etching (LAE) combining an Nd : YAG laser (λ = 1.06 μm) machining with etching using KOH solution has been applied to such ceramics as Al_2O_3/TiC, which are hard and difiicult materials for machining. The fundamental mechanism of LAE processing for Al_2O_3/TiC is that areas of a specimen irradiated by laser beams become chemically active melting substances having different components from the previous specimen, and that these substances react with KOH and are removed. The removal rates of LAE are, therefore, found to be dependent on both the laser power and the etchant concentration. LAE also induces little thermal influence resulting in the restraint of cracks compared with conventional laser processing, because the specimen is immersed in the KOH solution. Experimental results confirm that LAE is an effective technique for the micromachining of such ceramics as Al_2O_3/TiC.
公益社団法人精密工学会の論文
1987-07-05