セラミックウィスカーを励起源とするマイクロ波誘起常圧Arプラズマの発生と制御

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Microwave-induced plasma discharge behavior of doped and undoped SiC, In_2O_3 and SnO_2 whiskers has been investigated in different flowing gases under an atmospheric pressure. The whiskers exhibiting high electrical conductivity at a level of 10^2-10^3S cm^<-1> were brought to a red heat and emitted a strong light upon microwave irradiation in air flowing, and the light was confirmed as N_2 plasma by spectral analysis. In Ar flowing, however, a strong, long and narrow bluish white light was triggered by these whiskers upon microwave irradiation, and then the light was confirmed as Ar plasma based on the 4s-4p electron transition. After the Ar plasma was once generated, the whiskers were not needed for maintaining the plasma. In contrast, such plasma discharge was not observed with undoped SnO_2 whiskers having low electrical conductivity in flowing air as well as Ar. Thus, it is revealed that the whiskers exhibiting extremely high electrical conductivity act as a trigger for the generation of the Ar plasma. The life-time of the Ar plasma, i. e. the length of the Ar plasma streak, was enlarged by increasing the flow rate of Ar and the microwave power irradiated, but was shortened by the introduction of a small amount of He, N_2,CO_2 and O_2 to Ar flowing. For the effective use of the Ar plasma generated at atmospheric pressure, therefore, it is concluded that the control of both the flow rate and the gas composition of Ar-based flowing is of primary importance.
長崎大学の論文

セラミックウィスカーを励起源とするマイクロ波誘起常圧Arプラズマの発生と制御

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