Effect of Simultaneous Modification with Metal Loading and Mesoporous Layer on H2 Sensing Properties of SnO2 Thick Film Sensors (特集:悪臭・環境汚染センシング技術)

概要

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Effect of metal loading on the H2 sensing properties of semiconductor gas sensors prepared by the SnO2 powders modified with a mesoporous SnO2 layer has been investigated. Metal loading on the SnO2 powder prior to the modification with the mesoporous SnO2 layer resulted in larger H2 response than the sensor prepared by loading after the modification. This phenomenon was highlighted in the case of Ru loading, in comparison with Pd, probably due to its moderate catalytic activity. The markedly improved H2 response was considered to arise from a synergistic effect of the diffusion control by the mesoporous SnO2 layer and the chemical sensitization by the Ru loaded on the SnO2 powder surface. The smaller response induced by the Ru loading after the modification with the mesoporous SnO2 layer was attributed to consumption of H2 at the surface of the mesoporous SnO2 layer.
社団法人電気学会の論文
2005-02-01