塩化アルミニウム-エチレンジアミン系前駆体からの窒化アルミニウムの調製

概要

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Aluminum nitride powder was prepared by calcination of an organic precursor, which was synthesized by adding aluminum chloride powder in an ethylenediamine solvent in a dry N_2 atmosphere. It was confirmed from X-ray diffraction analysis and Fourier transform infrared spectroscopy that amorphous and hexagonal AIN powders formed from the precursor after calcination at 800 and 1200℃ for 5 h in flowing dry N_2 respectively. Scanning electron microscopic observation revealed that the AIN crystalites obtained at 1200℃ were less than 25 nm in diameter, through they easily agglomerated to from large grains of 60-100 μm. The particle size was comparable to the crystallite size(≈17.5 nm)calculated from the half width of the XRD(100)peak.
社団法人日本セラミックス協会の論文
2001-08-01