単斜晶ZrO_2ウイスカーの気相成長(2. 気相反応法)(<特集>新技術によるセラミックスの合成と評価(I))

概要

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Growth of ZrO2 whiskers by the reaction of ZrCl4 and O2 or H2O was examined at 1100°-1300℃. Only powder products were obtained at temperatures below 1200℃ in both reaction systems. At 1250°-1300℃, however, monoclinic whiskers or needle crystals were produced. In ZrCl4-O2 system, the whiskers were grown on a mullite substrate together with flaky materials, bricky crystals and powder. Optimum conditions for the whisker growth were ZrCl4 1-3%, O2 0.25-0.35%, and total flow rate of the reactant gas 40-60 cm3/min. The size of the whiskers was 0.1-2μm in width and 10-100μm in length. The growth axis was the <010> direction or perpendicular to the (104) plane. In ZrCl4-H2O system, no whiskers were formed on the substrate, but needle crystals (whisker-like) and powder were obtained at the outlet of the reaction tube. The monoclinic needles were very minute, their dimension being 0.05-0.5μm in width and 0.5-3μm in length. The growthe axis was the <010> direction or perpendicular to the (104), (113) or (211) plane. Optimum conditions were ZrCl4 2-5%, H2O 3-4%, and total flow rate of the reactant 30-60 cm3/min. Electron microsopic observation revealed that the whiskers and the needles had no particles on the tops, suggesting that both of them grew by a VS mechanism.
社団法人日本セラミックス協会の論文
1987-01-01