A GaAs SOI HEMT Fabricated by Fluidic Self-Assembly and Its Application to an RF-Switch
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概要
- 論文の詳細を見る
The heterogeneous integration of GaAs HEMTs on a polyimide-covered AlN ceramic substrate was demonstrated using a fluidic self-assembly (FSA) technique. We used thin device blocks for the FSA, which have various advantages. In particular, they can reduce the drain-source capacitance Cds of the assembled HEMTs if the substrate has a low dielectric constant. This is a novel kind of semiconductor-on-insulator (SOI) technology. The dc and RF properties of the GaAs HEMTs on the polyimide/AlN substrate were studied and the reduction of Cds was confirmed. This technique was successfully applied to the SPDT switch, where a low Cds is essential for good isolation.
- （社）電子情報通信学会の論文
- 2008-07-01
著者
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水谷 照吉
愛知工業大学電気工学科
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Mizutani Teruyoshi
Department Of Electrical Engineering School Of Engineering Nagoya University
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森 竜雄
Nagoya Univ. Aichi Jpn
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Mori T
Department Of Electrical Engineering Greduate School Of Engineering Nagoya University
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AKAMATSU Kazuhiro
Nippon Mining & Metals Co., Ltd.
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MAEZAWA Koichi
Graduate School of Engineering, Nagoya University
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KISHIMOTO Shigeru
Graduate School of Engineering, Nagoya University
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MIZUTANI Takashi
Graduate School of Engineering, Nagoya University
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Miyahara Tsuneaki
Photon Factory National Laboratory For High Energy Physics (kek)
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Mori Tatsushi
Department Of Electronics And Information Science Faculty Of Engineering And Design Kyoto Institute
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Maezawa Koichi
Ntt System Electronics Laboratories:(present) Faculty Of Engineering Nagoya University
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Mizutani T
Nagoya Univ. Nagoya‐shi Jpn
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Mizutani T
Ntt Lsi Laboratories
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Mizutani Takashi
Department Of Health Sciences Yamanashi Medical University
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Mizutani Takashi
Fundamental Research Laboratories Nec Corporation
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Mizutani Takashi
Ntt Lsi Laboratories
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Kishimoto Shigeru
Department Of Quantum Engineering Nagoya University
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SOGA Ikuo
Graduate School of Engineering, Nagoya University
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Akamatsu Kazuhiro
Nippon Mining & Metals Co. Ltd. Saitama Jpn
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Soga Ikuo
Graduate School Of Engineering Nagoya University
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Maezawa K
Graduate School Of Science And Engineering University Of Toyama
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Mitsuishi T
Utsunomiya Univ. Utsunomiya
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Maezawa Koichi
Graduate School Of Engineering Nagoya University
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Mizutani Takashi
Nagoya Univ. Nagoya‐shi Jpn
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Maezawa Koichi
Univ. Of Toyama Toyama‐shi Jpn
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Takemura Masayuki
Japan Atomic Energy Agency Hyogo
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