Polyimide 系プラズマ支援蒸着重合膜の構造解析

概要

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Organic thin films were prepared with pyromellitic dianhydride (PMDA) and oxydianiline (ODA) by vacuum evaporation with or without argon plasma, and molecular structures and surface morphologies of the PMDA, ODA, polyamic acid (PAA) and polyimide (PI) thin films were analyzed. The surface roughness decreased due to the plasma during the deposition. Oxygen content of the PMDA thin film prepared with the plasma decreased compared to that without the plasma. However, the PMDA thin film prepared with the plasma had a hydrophilic surface compared to that without the plasma. All of these organic thin films prepared with the plasma had hydrophilic surfaces compared to those without the plasma. Surface roughness of these thin films has a smaller effect on the wettability than hydrophilic moieties.
日本真空協会の論文
2010-03-20