フッ素樹脂をターゲットとして高周波スパッタリングにより作製した有機フッ素薄膜の特性

概要

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Polymer thin films were prepared by RF sputtering with argon (Ar) and tetra-fluorocarbon (CF4) gases. Four fluorocarbon polymers, poly(tetra fluoro ethylene) (PTFE), tetra fluoro ethylene-perfluoro alkylvinyl ether copolymer (PFA), fluorinated ethylene propylene copolymer (FEP), poly(vinylidene di fluoride) (PVDF) were used as the sputtering targets. Molecular structures of sputtered fluorocarbon thin films were analyzed with x-rays photoelectron spectroscopy (XPS) and fourier transform infrared spectroscopy (FT-IR). Wettability of these polymer thin films was estimated with contact angles of water droplets. The contact angles increased with increase of the F/C ratio (fluorine for carbon) of the thin film. PTFE target prepared by a spin coat method was also used for the sputtering target, and analyzed the elemental compositions of the target after the sputtering. The F/C ratio of the polymer thin film prepared by the sputtering with CF4 was almost the same value as that of the thin film with Ar. However, the C/F ratio of the target after the CF4 sputtering was much higher than that after the Ar sputtering.
2008-03-20