Precise Extraction of Metal Gate Work Function from Bevel Structures
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概要
- 論文の詳細を見る
- 2006-09-13
著者
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IWAI Hiroshi
Tokyo Institute of Technology
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FAYNOT Olivier
CEA-LETI, CEA Grenoble
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Iwai Hiroshi
Tokyo Inst. Of Technol. Yokohama‐shi Jpn
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Clerc Laurence
Cea-leti
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Faynot Olivier
Cea-leti
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Deleonibus Simon
Cea-leti
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KURIYAMA Atsushi
CEA-LETI
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BREVARD Laurent
CEA-LETI
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TOZZO Amelie
CEA-LETI
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MITARD Jerome
CEA-LETI
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VIDAL Vincent
CEA-LETI
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CRISTOLOVEANU Sorin
IMEP (UMR CNRS-INPG-UJF), ENSERG
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Cristoloveanu Sorin
Imep (umr Cnrs-inpg-ujf) Enserg
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Iwai Hiroshi
Tokyo Institute Of Technology Frontier Collaborative Research Center
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Iwai Hiroshi
Tokyo Inst. Of Technol. Yokohama Jpn
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- Effect of Post-Metallization Annealing on Electrical Characteristics of La_2O_3 Gate Thin Films
- Precise Extraction of Metal Gate Work Function from Bevel Structures
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