Integration of ultra shallow junctions in PVD TaN nMOS transistors with Flash Lamp Annealing

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概要

• 論文の詳細を見る
• 2005-09-13

著者

• Severi S.

  Imec

• Ragnarsson L-a

  Imec

• BIESEMANS S.

  IMEC

• DE MEYER

  IMEC

• PAWLAK B.

  Philips Research Leuven

• DUFFY R.

  Philips Research Leuven

• KERNER C.

  IMEC

• MCCOY S.

  Mattson Technology Canada

• GELPEY J.

  Mattson Technology Canada

• SELINGER T.

  Mattson Technology Canada

• ABSIL P.

  IMEC

• JURCZAK M.

  IMEC

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• Integrating Diffusionless Anneals Into Advanced CMOS Technologies
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