DE MEYER | IMEC
スポンサーリンク
概要
関連著者
-
Severi S.
Imec
-
BIESEMANS S.
IMEC
-
DE MEYER
IMEC
-
ABSIL P.
IMEC
-
JURCZAK M.
IMEC
-
Ragnarsson L-a
Imec
-
Van Daele
Imec
-
PAWLAK B.
Philips Research Leuven
-
DUFFY R.
Philips Research Leuven
-
KERNER C.
IMEC
-
MCCOY S.
Mattson Technology Canada
-
GELPEY J.
Mattson Technology Canada
-
SELINGER T.
Mattson Technology Canada
-
NODA T.
Matsushita Electric Industrial Co., Ltd.
-
VANDERVORST W.
IMEC
-
FELCH S.
Applied Materials
-
PARIHAR V.
Applied Materials
-
VRANCKEN C.
IMEC
-
HOFFMANN T.
IMEC
-
FALPIN A.
IMEC
-
JANNSSENS T.
IMEC
-
BENDER H.
IMEC
-
EYBEN P.
IMEC
-
NIWA M.
Matsushita Electric Industrial Co., Ltd.
-
SCHREUTELKAMP R.
Applied Materials
-
NOURI F.
Applied Materials
-
Niwa M.
Matsushita Electric Industrial Co. Ltd.
著作論文
- Integration of ultra shallow junctions in PVD TaN nMOS transistors with Flash Lamp Annealing
- Study of Dopant Diffusion and Defect Evolution for Advanced Ultra Shallow Junctions based on Atomistic Modeling