Nano-meter order Structures of Porous Low-k Films and their Impacts on Cu/Low-k Processes
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Otsuka Yuji
Toray Research Center Inc.
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Ogawa Shinichi
Semiconductor Leading Edge Technologies Inc.
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INOUE Yasuhide
NISSAN ARC, LTD.
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Inoue Yasuhide
Nissan Arc Ltd.
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SHIMADA Miyoko
Semiconductor Leading Edge Technologies Inc. (Selete)
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Shimada Miyoko
Semiconductor Leading Edge Technologies Inc.
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SHIMANUKI Junichi
NISSAN ARC, Ltd.
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HARADA Takahiro
Toray Research Center, Inc.
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Shimanuki Junichi
Nissan Arc Ltd.
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Harada Takahiro
Toray Research Center Inc.
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