Evidence of Electrical and Structural Evolution of Gate Dielectric Breakdown Observed by Conductive Atomic Force Microscopy
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概要
- 論文の詳細を見る
- 2005-09-13
著者
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Mitani Yuichiro
Advanced Lsi Technology Laboratory Corporate R&d Center Toshiba Corporation
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Mitani Yuichiro
Advanced Lsi Technology Laboratory Corporate Research & Development Center Toshiba Corporation
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Zhang Li
Advanced Lsi Technology Laboratory Corporate Research & Development Center Toshiba Corporation
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