Oxidation Dynamics of Si(100) Surface with O_2 Molecular Beam
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概要
- 論文の詳細を見る
- 2005-07-01
著者
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Matsumoto Yoichiro
Department Of Mechanical Engineering The University Of Tokyo
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Ito Akira
Department Of Biochemistry And Molecular Biology School Of Pharmacy Tokyo University Of Pharmacy And
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Yamaguchi Hiroki
Department Of Cardiology Okayama University Graduate School Of Medicine
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SAKIYAMA Yukinori
Department of Mechanical Engineering, Tokyo University
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KINEFUCHI Ikuya
Department of Mechanical Engineering, The University of Tokyo
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Kinefuchi Ikuya
Department Of Mechanical Engineering The University Of Tokyo
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Sakiyama Yukinori
Department Of Mechanical Engineering The University Of Tokyo
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Yamaguchi Hiroki
Department Of Mechanical Engineering The University Of Tokyo
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Matsumoto Yoichiro
Department of Bioengineering, Graduate School of Engineering, The University of Tokyo, Bunkyo, Tokyo 113-8656, Japan
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