Study of Optical Properties of Zinc Oxide Thin Film Implanted with Nitrogen by Combinatorial Ion Implantation Techniques
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概要
- 論文の詳細を見る
- 2006-09-15
著者
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Hosono H
Materials And Structures Laboratory Tokyo Institute Of Technology
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SAKAGUCHI Isao
National Institute for Materials Science
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HANEDA Hajime
National Institute for Materials Science
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OHASHI Naoki
National Institute for Material Science
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Ohashi N
National Inst. For Materials Sci.
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SATO Yoshiyuki
NTT Advanced Technology Corporation
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