Caを15mol%置換したLaCrO_3薄膜高温発熱体の発熱特性の基板純度依存性

概要

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Lanthanum chromite (LaCrO3) has excellent chemical stability at high temperature. LaCrO3 doped with alkaline earth metals has high electric conductivity as a heater material having operating temperatures starting from room temperature. The purpose of this study is to fabricate heaters using thin films of LaCrO3 doped with dopant Ca which is deposited on alumina substrates with different purities by RF magnetron sputtering and evaluate their characteristics under any conditions. Thin films of Ca doped LaCrO3 shows different heating characteristics with dc current drive for the different purity of alumina substrate. In case of lower purity (95.3%), long term stabilities of LaCrO3 thin film heaters showed the increase of the residence with increasing time. On the other hands, in case of high purity (approximately 99.5%), the resistance was almost constant. It is speculated that impurities, such as SiO2, contained in a alumina substrate enhance the migration of La, Cr, or Ca atoms through the Pt electrode and increase the resistance of a heater. It is considered the increase of resistance is caused by such reaction.
2005-08-01