Electrostatic Discharge Protection under Pad Design for Copper-Low-K VLSI Circuits
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-04-30
著者
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Lee Jam
Department Of Computational Nanoelectronics National Nano Device Laboratories
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LI Yiming
Department of Nano Device Technology, National Nano Device Laboratories
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Li Yiming
Department Of Computational Nanoelectronics National Nano Device Laboratories
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Li Yiming
Department Of Communication Engineering National Chiao Tung University
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CHAO Alice
United Microelectronics Corporation
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TANG Howard
United Microelectronics Corporation
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