Development of SnO_2-based Gas Sensors for Detection of Volatile Organic Compounds

概要

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Recently, sick-house syndrome receive much public attention as a problem of indoor environment. Volatile organic compounds (VOCs) such as formaldehyde HCHO) and xylene (C6H4(CH3)2) generated from building materials are pointed out as one of origins of sick-house syndrome. In the present work, in order to develop a semiconductor type VOC sensor, first of all, the sensitivities of several oxide semiconductor materials were studied. Among the 23 metals oxides examined, the highest sensitivity to HCHO was achieved by SnO2. Further, the sensing property of an SnO2 sensor to 100ppm HCHO was extremely improved by addition of 3 wt% Ag at 300°C, but the sensor had a short lifetime. In order to explore another additives, VOC sensing properties of SnO2 loaded with several metal oxides were investigated. Among the elements loaded (5 wt%) with each of 14 metal oxides, the Mn2O3-loaded one was outstanding in sensitivity to HCHO at 200°C. However, its sensitivity of the doubly promoted sensor, Ag (1 wt%)-Mn2O3 (5 wt%)-SnO2 to HCHO was lower than that of each sensor loaded with one additive.
社団法人電気学会の論文
2001-07-01