配列粒子の被膜形成による基板上への固定

概要

論文の詳細を見る
Silica particles of 5μmφ were arranged on CaTiO3 substrates by the drawing and the developing steps, as reported in a previous paper. Fixing treatment is necessary to repeat the arranging process to produce the three-dimensional micro-structures. A thin film of fluoride polymer was formed on the substrates after the particle arrangement to fix the arranged particles. The effects of the fixing treatment on the arranged particles and the arranging process were investigated. The following results were obtained. (1) Electrified patterns are formed on the substrates with an electron beam scanning in the drawing step. More sharp patterns are obtained by preforming the thin film of fluoride polymer on the substrates. This improvement is due to suppression of surface diffusion of the electrified charges by the film. (2) The particles are arranged by the electrostatic force in the developing step. Since the electrified pattern is sharp, better particle arrangement can be obtained by preforming the film on the substrates. (3) The film holds the adhered particles through the second time drawing and developing steps and the arranged particles are scarcely affected by the fixing treatment. These results suggest that the formation of thin film of fluoride polymer is effective for the fixing treatment and that three-dimensional micro-structures can be produced by the particle assemblage
社団法人資源・素材学会の論文
1998-02-25