マイクロシリカ粒子の静電気力による配列プロセス

概要

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Assembly of particles is one of the build-up methods for fabrication of organized structures in the range from micro- to nanometer scales. We have been developing a new technique to assemble microscale particles for the fabrication of two-dimensionally controlled micro structures. The procedure is as follows : an electrified pattern is formed on a dielectric substrate by scanning charging beams. Tne substrate is then dipped into a suspension in which the particles are dispersed. The particles are arrayed on the electrified pattern. In this paper, we investigated the electrostaric force which attracts the particles in the suspension. Spherical silica particles of 5 μm diameter were used as model particles, and the particles were charged in negative polarity in the suspension. The particles were deposited on both the negatively and positively charged patterns. This result suggests that gradient force plays an important role in attracting particles. The electrostatic forces for a particle in the suspension were calculated using numerical analysis. The result showed that the gradient force is larger than the Coulomb force near the electrified pattern.
日本エアロゾル学会の論文
2000-06-20