Micro Molding in Capillaries (MIMIC)法に高浸透性液体の毛管力を利用したセラミックコロイドサスペンションのマイクロパターニング

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This paper describes the fabricating of ceramic micro-scale patterns over a wide area using colloidal suspensions of ceramic powders in the improved Micromolding in Capillaries (MIMIC) method. As the patterning mechanism is based on capillary actions of suspensions, the MIMIC process has a difficulty in that the patterning lengths are determined by the characteristics of the suspensions. For fabricating a striped pattern of long lines with various suspensions, we added a new process of second capillary action of liquids with a high infiltration characteristic after existing MIMIC process, so that the suspensions were moved farther inside with the strong capillary force arising from the liquids which afterward infiltrate. In addition, by repeating the series of capillary actions of suspensions and infiltrating liquids, we could double the patterned lengths of the tin oxide. This study demonstrates the possibility of wide-area patterning of a suspension that is not likely to voluntarily infiltrate with improved MIMIC process.
社団法人日本セラミックス協会の論文
2006-08-01