カソード電着法によるチタニア薄膜の作製(<特集>水溶液科学に立脚したセラミックス合成プロセス)

概要

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The cathodic electrodeposition of titania thin films from solutions containing a titanium salt was studied. Titanium tetrachloride was dissolved in an ethanol-water solution with hydrogen peroxide to prepare titanium peroxocomplex solutions. The deposition of the titania precursor on platinum-coated silicon wafer substrates was carried out by electrolysis of the solutions under constant current conditions. The deposits were thermally treated at fixed temperatures in air and then characterized by X-ray diffraction and scanning electron microscopy.
社団法人日本セラミックス協会の論文
2007-12-01