Micro gas sensor assembly of tin oxide nano-particles by a capillary micro-molding process
スポンサーリンク
概要
- 論文の詳細を見る
This paper reports a micro gas sensor assembled with tin oxide, SnO2, nano-powders. The micro gas sensors are fabricated by a modified micro molding in capillary (MIMIC) technique using an ethanol suspension with 2.0 vol% SnO2 nano-powders. A micro pattern is formed as a set of parallel lines 23 μm in width and 1.2 μm in depth. The micro pattern is heat treated at 300°C for 5 h. The micro-sensor was able to detect ethanol gas by measuring the electrical resistance of the tin oxide a glass tube furnace. When ethanol vapor flows through the furnace the resistance decreases and the response time is 1.9 s. The sensor resistance ratio was determined to be 19.5 at 450°C. Our modified MIMIC technique enables easy and simple fabrication of ethanol vapor micro-sensors in a cost-effective way.
著者
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Fudouzi Hiroshi
National Institute for Materials Science
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Sakka Yoshio
National Institute for Materials Science
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不動寺 浩
金属材料技術研究所
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Sakka Y
National Inst. Materials Sci. Tsukuba Jpn
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Sakka Yoshio
Fine Particle Processing Group National Institute For Materials Science
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Fudouzi Hiroshi
National Institute For Materials Science Optronic Materials Center
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Sakka Yoshio
National Inst. For Materials Sci.
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Sakka Yoshio
Wpi Research Center Initiative On Materials Nanoarchitectonics National Institute For Materials Scie
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Sakka Yoshio
National Reserch Institute For Metals
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Sakka Yoshio
Nano Ceramics Center National Institute For Materials Science (nims)
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Sakka Yoshio
Materials Processing Division National Research Institute For Metals
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Sakka Yoshio
Fine Particle Processing Group Materials Engineering Laboratory National Institute For Materials Sci
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Sakka Yoshio
National Research Institute For Metals
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FUDOUZI H.
National Institute for Materials Science
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