Formation of zirconia films by aerosol gas deposition method using zirconia powder produced by break-down method

概要

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The purpose of this study is to form a film of dry-milled zirconia powders by aerosol gas deposition (AGD). Recently, we reported that we could form a high-density zirconia film using wet-type zirconia powders prepared wet-chemically. From the stand point of industrial use, the dry-milled zirconia powder seems to be much more advantageous than the wet type. In this study, we examined the possibility to fabricate zirconia film using commercially available dry-milled zirconia powders with a mean diameter range that is nearly the same as those of wet-type ones, for example, 0.73 to 10.2 µm in mean diameter. As a result, we were able to make a zirconia film from all powders, although the film formation conditions for the wet-type powder was very much limited in the diameter and the specific surface area. In conclusion, dry-milled zirconia powders are considered to have high potential for industrial use.
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